Specifications:

Application for edged welded Bellows:

Accumulators

Beam Lines

Cassette Elevators

Chamber-Lift Bellows

Connectors

Couplings - Flexible & Torque

Flexible Connectors/Expansion Joints

Gas Line Flexible Connectors

Gate Valves

Heater Assemblies

Hermetic Feedthroughs

Leak Detectors

Lifters

Pedestal Lifts

Pin Lift Actuators

Reservoirs/Volume Compensators

Sensors

Slit Valves

Spindle Assemblies

Valve Door Modules

Valve Stem Seals

Vibration Isolators

Wafer-Lift Bellows

Wafer Handlers

Wafer Orienters

X-Y-Z Manipulators

1.Expansion Joint(EJMA Standard)
2.Flexible Joint(Manipulator Feedthrough)
3.Accumulator
4.Proportional Tempture Control
5.Packingless Valve, Aseptic Bellows Valve
6.Mechanical Sealing
7.Rotary seal housing
8.Pressure switch
9.Remote flow control
10.Flexible coupling
11.Steam trap

Features:

Stainless Vacuum Bellows

UHV Bellows

High Vacuum Bellows

Semiconductor Bellows

Certificate:

• EJMA/SEMI

Order Information:

• Minimum Order: Negotiable
• Branded Product