化合物半导体 InP, GaP, GaAs 单晶成长法(VGF / VB / LEC)用坩锅 /多晶合成坩锅 / 合成舟 (boats)
VGF 坩锅
VB 坩锅
LEC 坩锅
MBE 坩锅
MOCVD 绝缘板
PBN 材料特性
* Ultra purity, low density
* Excellent mechanical strength
* Better thermal conductivity and thermal stability
* High dielectric strength
* None toxic, none porous
* Withstands high tempture and rapid cooling process
* Tensile strength increases with tempture
* None reactive to most compounds
* High oxidation resistance
* Low outgas